Short-chain aminosilanes, namely, bis(N,N-dimethylamino)dimethylsilane (DMADMS) and (N,N-dimethylamino)trimethylsilane (DMATMS), have been used as Si precursors for atomic layer deposition (ALD) of ...

Resonant high-energy X-ray diffraction coupled to atomic pair distribution function analysis and computer simulations is used to study the atomic-scale structure of group 11 nanosized metals and ...